Surface Science Facility

Facility Director: Yip-Wah Chung, MSE

The Surface Science Facility provides multiple-technique characterization of a variety of surfaces with regard to atomic structure, surface chemical composition, and chemical bonding characteristics.


1. AFM/Nanoindentor: for high-resolution imaging and nanoindentation studies.

2. Laser writing: for generating controlled surface roughness and patterns.

3. Optical profilometers: Two optical interferometers (Zygo and Aliconia) are available for surface topographic imaging.

4. Three-target magnetron sputter-deposition system

Training Seminars/Workshops
Provisions have been made to accommodate routine short-term measurements by user groups as well as more extended studies. User and research groups are encouraged to work with the facility staff to tailor the facility resources to the research project.